I replaced the carpet on a 2000 Monaco Diplomat with 2 slides.  There was no scratching on the flooring after a years worth of slide use.  I sanded and painted the base wood floor with a white sealer.  Stapled a vapor pad to the base flooring then set commercial grade flooring planks, gluing the edges together with contact cement, over the pad.  Leave a 1/4 inch of space at the wall for expansion and shifting as the coach torques during driving.  We had a ceramic tile floor in the kitchen area and had to make a leveler where the 2 types of floors meet.  Measure, and measure again before you saw, cut, or drill.

Remember to leave holes to bolt the chairs and couches back to the floor mounts.  We did NOT remove the carpet from the slide as it was hidden by the couch.  The new flooring went from the front of the coach to the kitchen and lasted for over 5 years before we sold the coach.